Industry News
Particle Sensor Released for Wafer Processing Equipment
CyberOptics Semiconductor, Inc. has released the WaferSense® Airborne Particle Sensor for wafer processing equipment to the semiconductor market. The only semiconductor sensor of its kind to identify particle sources in tool, the Airborne Particle Sensor moves through semiconductor process equipment and automation material handling systems to monitor airborne particles. The sensor reports information in real-time, which allows engineers to efficiently validate wafer contamination, and speeds tool qualification and release to production.